SOI MEMS Based Over-Sampling Accelerometer Design with ΔΣ Output

Dushyant Juneja, Sougata Kar, Procheta Chatterjee, Siddhartha Sen. SOI MEMS Based Over-Sampling Accelerometer Design with ΔΣ Output. In Hafizur Rahaman, Sanatan Chattopadhyay, Santanu Chattopadhyay, editors, Progress in VLSI Design and Test - 16th International Symposium, VDAT 2012, Shibpur, India, July 1-4, 2012. Proceedings. Volume 7373 of Lecture Notes in Computer Science, pages 121-128, Springer, 2012. [doi]

Abstract

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