Design-aware mask inspection

Abde Ali Kagalwalla, Puneet Gupta, Chris Progler, Steve McDonald. Design-aware mask inspection. In 2010 International Conference on Computer-Aided Design (ICCAD 10), November 7-11, 2010, San Jose, CA, USA. pages 93-99, IEEE, 2010. [doi]

@inproceedings{KagalwallaGPM10,
  title = {Design-aware mask inspection},
  author = {Abde Ali Kagalwalla and Puneet Gupta and Chris Progler and Steve McDonald},
  year = {2010},
  doi = {10.1109/ICCAD.2010.5654304},
  url = {http://dx.doi.org/10.1109/ICCAD.2010.5654304},
  tags = {context-aware, design},
  researchr = {https://researchr.org/publication/KagalwallaGPM10},
  cites = {0},
  citedby = {0},
  pages = {93-99},
  booktitle = {2010 International Conference on Computer-Aided Design (ICCAD 10), November 7-11, 2010, San Jose, CA, USA},
  publisher = {IEEE},
}