Introduction to MEMS; their applications as sensors for chemical & bio sensing

Nitin S. Kale. Introduction to MEMS; their applications as sensors for chemical & bio sensing. In 19th International Symposium on VLSI Design and Test, VDAT 2015, Ahmedabad, India, June 26-29, 2015. pages 1-2, IEEE, 2015. [doi]

Abstract

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