Masayoshi Kamijo, Shin'ichi Aihara, Masaru Nakazawa. Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface. Systems and Computers in Japan, 26(13):44-54, 1995. [doi]
@article{KamijoAN95,
title = {Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface},
author = {Masayoshi Kamijo and Shin'ichi Aihara and Masaru Nakazawa},
year = {1995},
doi = {10.1002/scj.4690261305},
url = {http://dx.doi.org/10.1002/scj.4690261305},
researchr = {https://researchr.org/publication/KamijoAN95},
cites = {0},
citedby = {0},
journal = {Systems and Computers in Japan},
volume = {26},
number = {13},
pages = {44-54},
}