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Masayoshi Kamijo, Shin'ichi Aihara, Masaru Nakazawa. Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface. Systems and Computers in Japan, 26(13):44-54, 1995. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Identification for complicated shape objects by using stochastic fractal variables - categorizing dust particles on LSI wafer surfaceMasayoshi Kamijo, Shin'ichi Aihara. scjapan, 26(4):74-83, 1995. [doi] Identification of complicated shape objects by fractal characteristic variables - categorizing dust particles on LSI wafer surfaceMasayoshi Kamijo, Masaru Nakazawa, Yoshio Shimizu. scjapan, 27(6):82-91, 1996. [doi]
The following publications are possibly variants of this publication: