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Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface

Masayoshi Kamijo, Shin'ichi Aihara, Masaru Nakazawa. Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface. Systems and Computers in Japan, 26(13):44-54, 1995. [doi]

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