Simon Kamm, Kanuj Sharma, Nasser Jazdi, Michael Weyrich. A Hybrid Modelling Approach for Parameter Estimation of Analytical Reflection Models in the Failure Analysis Process of Semiconductors. In 17th IEEE International Conference on Automation Science and Engineering, CASE 2021, Lyon, France, August 23-27, 2021. pages 417-422, IEEE, 2021. [doi]
Abstract is missing.