Itaru Kamohara, Ulrich Welling, Ulrich Klostermann, Wolfgang Demmerle. Stochastic Modeling and Local CD Uniformity Comparison between Negative Metal-Based, Negative- and Positive-Tone Development EUV Resists. IEICE Trans. Electron., 105-C(1):35-46, 2022. [doi]
@article{KamoharaWKD22, title = {Stochastic Modeling and Local CD Uniformity Comparison between Negative Metal-Based, Negative- and Positive-Tone Development EUV Resists}, author = {Itaru Kamohara and Ulrich Welling and Ulrich Klostermann and Wolfgang Demmerle}, year = {2022}, doi = {10.1587/transele.2021ecp5010}, url = {https://doi.org/10.1587/transele.2021ecp5010}, researchr = {https://researchr.org/publication/KamoharaWKD22}, cites = {0}, citedby = {0}, journal = {IEICE Trans. Electron.}, volume = {105-C}, number = {1}, pages = {35-46}, }