Si based MEMS near-infrared photodetector and application for oxygen saturation measurement

Tetsuo Kan, Yukiko Maruyama, Yoshiharu Ajiki. Si based MEMS near-infrared photodetector and application for oxygen saturation measurement. In IEEE International Conference on Cyborg and Bionic Systems, CBS 2017, Beijing, China, October 17-19, 2017. pages 194-197, IEEE, 2017. [doi]

Abstract

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