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Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application

Xiaoxu Kang, Jiaqing Li, Chao Yuan, Shoumian Chen, Yuhang Zhao. Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application. Journal of Circuits, Systems, and Computers, 22(10), 2013. [doi]

Authors

Xiaoxu Kang

This author has not been identified. Look up 'Xiaoxu Kang' in Google

Jiaqing Li

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Chao Yuan

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Shoumian Chen

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Yuhang Zhao

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