Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application

Xiaoxu Kang, Jiaqing Li, Chao Yuan, Shoumian Chen, Yuhang Zhao. Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application. Journal of Circuits, Systems, and Computers, 22(10), 2013. [doi]

@article{KangLYCZ13,
  title = {Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application},
  author = {Xiaoxu Kang and Jiaqing Li and Chao Yuan and Shoumian Chen and Yuhang Zhao},
  year = {2013},
  doi = {10.1142/S0218126613400215},
  url = {http://dx.doi.org/10.1142/S0218126613400215},
  researchr = {https://researchr.org/publication/KangLYCZ13},
  cites = {0},
  citedby = {0},
  journal = {Journal of Circuits, Systems, and Computers},
  volume = {22},
  number = {10},
}