Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application

Xiaoxu Kang, Jiaqing Li, Chao Yuan, Shoumian Chen, Yuhang Zhao. Tan Bottom electrode thermal Sensing resistor for MEMS-Based Bolometer Application. Journal of Circuits, Systems, and Computers, 22(10), 2013. [doi]

Abstract

Abstract is missing.