Xiaoxu Kang, Chao Yuan, Qingyun Zuo, Changwa Yao, Shoumian Chen, Yuhang Zhao, Yilin Yan, Yuanjun Xu, Weiping Zhou. Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer. In IEEE 10th International Conference on ASIC, ASICON 2013, Shenzhen, China, October 28-31, 2013. pages 1-3, IEEE, 2013. [doi]
@inproceedings{KangYZYCZYXZ13,
title = {Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer},
author = {Xiaoxu Kang and Chao Yuan and Qingyun Zuo and Changwa Yao and Shoumian Chen and Yuhang Zhao and Yilin Yan and Yuanjun Xu and Weiping Zhou},
year = {2013},
doi = {10.1109/ASICON.2013.6811942},
url = {http://dx.doi.org/10.1109/ASICON.2013.6811942},
researchr = {https://researchr.org/publication/KangYZYCZYXZ13},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {IEEE 10th International Conference on ASIC, ASICON 2013, Shenzhen, China, October 28-31, 2013},
publisher = {IEEE},
isbn = {978-1-4673-6415-7},
}