Xiaoxu Kang, Chao Yuan, Qingyun Zuo, Changwa Yao, Shoumian Chen, Yuhang Zhao, Yilin Yan, Yuanjun Xu, Weiping Zhou. Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer. In IEEE 10th International Conference on ASIC, ASICON 2013, Shenzhen, China, October 28-31, 2013. pages 1-3, IEEE, 2013. [doi]
Abstract is missing.