Mustafa Emre Karagozler, Anil Thaker, Seth Copen Goldstein, David S. Ricketts. Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip. In International Symposium on Circuits and Systems (ISCAS 2011), May 15-19 2011, Rio de Janeiro, Brazil. pages 2509-2512, IEEE, 2011. [doi]
Abstract is missing.