Resistive Bridging Defect Detection in Bulk, FDSOI and FinFET Technologies

Amit Karel, Mariane Comte, Jean Marc Gallière, Florence Azaïs, Michel Renovell. Resistive Bridging Defect Detection in Bulk, FDSOI and FinFET Technologies. J. Electronic Testing, 33(4):515-527, 2017. [doi]

Abstract

Abstract is missing.