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Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control

Ashenafi Abrham Kassa, Bijan Shirinzadeh, Kim Sang Tran, Kai Zhong Lai, Yanling Tian, Yanding Qin, Huaxian Wei. Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control. Sensors, 24(2):663, January 2024. [doi]

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