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Novel Feature Vectors Considering Distances between Wires for Lithography Hotspot Detection

Gaku Kataoka, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi. Novel Feature Vectors Considering Distances between Wires for Lithography Hotspot Detection. In Martin Novotný, Nikos Konofaos, Amund Skavhaug, editors, 21st Euromicro Conference on Digital System Design, DSD 2018, Prague, Czech Republic, August 29-31, 2018. pages 85-90, IEEE Computer Society, 2018. [doi]

Authors

Gaku Kataoka

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Masato Inagi

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Shinobu Nagayama

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Shin'ichi Wakabayashi

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