Adhesion lithography to fabricate MoS2 FETs with self-assembled monolayer-based gate dielectrics

Takamasa Kawanago, Ryo Ikoma, Du Wanjing, Shunri Oda. Adhesion lithography to fabricate MoS2 FETs with self-assembled monolayer-based gate dielectrics. In 46th European Solid-State Device Research Conference, ESSDERC 2016, Lausanne, Switzerland, September 12-15, 2016. pages 291-294, IEEE, 2016. [doi]

Abstract

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