An array-based test circuit for fully automated gate dielectric breakdown characterization

John Keane, Shrinivas Venkatraman, Paulo F. Butzen, Chris H. Kim. An array-based test circuit for fully automated gate dielectric breakdown characterization. In Proceedings of the IEEE 2008 Custom Integrated Circuits Conference, CICC 2008, DoubleTree Hotel, San Jose, California, USA, September 21-24, 2008. pages 121-124, IEEE, 2008. [doi]

Abstract

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