Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer - researchr publication authors

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Awatef Khlifi, Aftab Ahmed, Brahim Mezghani, Rajul Patkar, Pradeep Dixit, Fares Tounsi, Maryam Shojaei Baghini. Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer. Microelectronics Journal, 128:105552, 2022. [doi]

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