Awatef Khlifi, Aftab Ahmed, Brahim Mezghani, Rajul Patkar, Pradeep Dixit, Fares Tounsi, Maryam Shojaei Baghini. Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer. Microelectronics Journal, 128:105552, 2022. [doi]
@article{KhlifiAMPDTB22,
title = {Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer},
author = {Awatef Khlifi and Aftab Ahmed and Brahim Mezghani and Rajul Patkar and Pradeep Dixit and Fares Tounsi and Maryam Shojaei Baghini},
year = {2022},
doi = {10.1016/j.mejo.2022.105552},
url = {https://doi.org/10.1016/j.mejo.2022.105552},
researchr = {https://researchr.org/publication/KhlifiAMPDTB22},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {128},
pages = {105552},
}