Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates

Katsuya Kikuchi, Koichi Takemura, Chihiro Ueda, Osamu Shimada, Toshio Gomyo, Yukiharu Takeuchi, Toshikazu Okubo, Kazuhiro Baba, Masahiro Aoyagi, Toshio Sudo, Kanji Otsuka. Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates. In IEEE International Conference on 3D System Integration, 3DIC 2009, San Francisco, California, USA, 28-30 September 2009. pages 1-4, IEEE, 2009. [doi]

Abstract

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