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Reliability Impacts of Tapered Nanosheets and Localized Layout Effects in MBCFETs Fabricated with 2NM Logic Technology Featuring GAA

Seongkyung Kim, Eunyu Choi, Jinyoung Kim, Junkyo Jeong, Jihun Ryu, Myungsoo Yeo, Taiki Uemura, Shin-Young Chung, Jong-Ho Lee. Reliability Impacts of Tapered Nanosheets and Localized Layout Effects in MBCFETs Fabricated with 2NM Logic Technology Featuring GAA. In IEEE International Reliability Physics Symposium, IRPS 2025, Monterey, CA, USA, March 30 - April 3, 2025. pages 83, IEEE, 2025. [doi]

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