High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology - researchr publication authors

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Ji Hong Kim, Sung-Min Hong, Jang Sub Lee, Byung-Moo Moon, Kunnyun Kim. High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 703-706, IEEE, 2009. [doi]

This author has not been identified. Look up 'Ji Hong Kim' in GoogleThis author has not been identified. Look up 'Sung-Min Hong' in GoogleThis author has not been identified. Look up 'Jang Sub Lee' in GoogleThis author has not been identified. Look up 'Byung-Moo Moon' in GoogleThis author has not been identified. Look up 'Kunnyun Kim' in Google

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