Modeling growth rate of HfO::2:: thin films grown by metal-organic molecular beam epitaxy

Myoung-Seok Kim, Young-Don Ko, Tae-Houng Moon, Jae-Min Myoung, Ilgu Yun. Modeling growth rate of HfO::2:: thin films grown by metal-organic molecular beam epitaxy. Microelectronics Journal, 37(2):98-106, 2006. [doi]

Abstract

Abstract is missing.