Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process - researchr publication

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Jae Kwon Kim, Jong Sik Lee, Youngshin Han. Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process. International Journal of Software Engineering and Knowledge Engineering, 29(8):1125-1139, 2019. [doi]

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