14nm DRAM Development and Manufacturing

Kanguk Kim, Youngwoo Son, Hoin Ryu, ByungHyun Lee, Jooncheol Kim, Hyunsu Shin, Joonyoung Kang, Jihun Kim, Shinwoo Jeong, Kyosuk Chae, Dongkak Lee, Ilwoo Jung, Yongkwan Kim, Boyoung Song, Jeonghoon Oh, Jungwoo Song, Seguen Park, Keumjoo Lee, Hyodong Ban, Jiyoung Kim, Jooyoung Lee. 14nm DRAM Development and Manufacturing. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

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