Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
In-Joong Kim, Ilgu Yun. Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens. IEEE Transactions on Industrial Electronics, 63(9):5674-5681, 2016. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment controlJunmo Koo, Daegeun Ha, Damdae Park, Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim, Kye Hyun Baek, Chonghun Han. cce, 100:38-47, 2017. [doi]
The following publications are possibly variants of this publication: