Drastic reduction of keep-out-zone in 3D-IC by local stress suppression with negative-CTE filler - researchr publication

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Hisashi Kino, Takafumi Fukushima, Tetsu Tanaka. Drastic reduction of keep-out-zone in 3D-IC by local stress suppression with negative-CTE filler. In 2016 IEEE International 3D Systems Integration Conference, 3DIC 2016, San Francisco, CA, USA, November 8-11, 2016. pages 1-4, IEEE, 2016. [doi]

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