Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer

Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel. Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 405, IEEE Computer Society, 2003. [doi]

Authors

Bradley J. Kirchmayer

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Walied A. Moussa

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M. David Checkel

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