Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel. Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 405, IEEE Computer Society, 2003. [doi]
@inproceedings{KirchmayerMC03, title = {Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer}, author = {Bradley J. Kirchmayer and Walied A. Moussa and M. David Checkel}, year = {2003}, url = {http://csdl.computer.org/comp/proceedings/icmens/2003/1947/00/19470405abs.htm}, tags = {modeling}, researchr = {https://researchr.org/publication/KirchmayerMC03}, cites = {0}, citedby = {0}, pages = {405}, booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada}, publisher = {IEEE Computer Society}, isbn = {0-7695-1947-4}, }