Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel. Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 405, IEEE Computer Society, 2003. [doi]
Abstract is missing.