A contribution towards model-based design of application-specific MEMS

Jenny Klaus, Eric Schaefer, Roman Paris, Astrid Frank, Ralf Sommer. A contribution towards model-based design of application-specific MEMS. Integration, 58:454-462, 2017. [doi]

Authors

Jenny Klaus

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Eric Schaefer

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Roman Paris

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Astrid Frank

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Ralf Sommer

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