Jenny Klaus, Eric Schaefer, Roman Paris, Astrid Frank, Ralf Sommer. A contribution towards model-based design of application-specific MEMS. Integration, 58:454-462, 2017. [doi]
@article{KlausSPFS17,
title = {A contribution towards model-based design of application-specific MEMS},
author = {Jenny Klaus and Eric Schaefer and Roman Paris and Astrid Frank and Ralf Sommer},
year = {2017},
doi = {10.1016/j.vlsi.2017.03.014},
url = {https://doi.org/10.1016/j.vlsi.2017.03.014},
researchr = {https://researchr.org/publication/KlausSPFS17},
cites = {0},
citedby = {0},
journal = {Integration},
volume = {58},
pages = {454-462},
}