Heung-Kook Ko, Sena Park, Jihyun Ryu, Sung-Ryul Kim, Giwon Lee, DongJoon Lee, Sangwoo Pae, Euncheol Lee, Yongsun Ji, Hia Jiang, Taeyoung Jeong, Taiki Uemura, Dongkyun Kwon, Hyungrok Do, Hyungu Kahng, Yoon-Sang Cho, Jiyoon Lee, Seoung Bum Kim. Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-5, IEEE, 2020. [doi]
Abstract is missing.