Deniz Kocaay, Philippe Roussel, Kris Croes, Ivan Ciofi, Y. Saad, Ingrid De Wolf. LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration. Microelectronics Reliability, 76:131-135, 2017. [doi]
@article{KocaayRCCSW17,
title = {LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration},
author = {Deniz Kocaay and Philippe Roussel and Kris Croes and Ivan Ciofi and Y. Saad and Ingrid De Wolf},
year = {2017},
doi = {10.1016/j.microrel.2017.06.053},
url = {https://doi.org/10.1016/j.microrel.2017.06.053},
researchr = {https://researchr.org/publication/KocaayRCCSW17},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {76},
pages = {131-135},
}