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LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration

Deniz Kocaay, Philippe Roussel, Kris Croes, Ivan Ciofi, Y. Saad, Ingrid De Wolf. LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration. Microelectronics Reliability, 76:131-135, 2017. [doi]

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