Modeling of HKMG Stack Process Impact on Gate Leakage, SILC and PBTI

Dimple Kochar, Tarun Samadder, Subhadeep Mukhopadhyay 0003, Souvik Mahapatra. Modeling of HKMG Stack Process Impact on Gate Leakage, SILC and PBTI. In IEEE International Reliability Physics Symposium, IRPS 2021, Monterey, CA, USA, March 21-25, 2021. pages 1-7, IEEE, 2021. [doi]

Abstract

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