Yasumasa Koda, Rihito Kuroda, Taiki Nakazawa, Y. Nakao, Shigetoshi Sugawa. A UV Si-photodiode with almost 100% internal Q.E. and high transmittance on-chip multilayer dielectric stack. In Ralf Widenhorn, Antoine Dupret, editors, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV, Burlingame, California, USA, February 3-7, 2013. Volume 8659 of SPIE Proceedings, SPIE, 2013. [doi]
Abstract is missing.