Agathe Koller-Hodac, Manuel Altmeyer, Silvio Walpen. Precision Assembling and Hybrid Bonding for Micro Fluidic Systems. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems, 5th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2010, Chamonix, France, February 14-17, 2010. Proceedings. Volume 315 of IFIP, pages 65-72, Springer, 2010. [doi]
Abstract is missing.