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Failure modes for stiction in surface-micromachined MEMS

Abhijeet Kolpekwar, Ronald D. Blanton, David Woodilla. Failure modes for stiction in surface-micromachined MEMS. In Proceedings IEEE International Test Conference 1998, Washington, DC, USA, October 18-22, 1998. pages 551-556, IEEE Computer Society, 1998. [doi]

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Abhijeet Kolpekwar

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Ronald D. Blanton

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David Woodilla

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