Failure modes for stiction in surface-micromachined MEMS

Abhijeet Kolpekwar, Ronald D. Blanton, David Woodilla. Failure modes for stiction in surface-micromachined MEMS. In Proceedings IEEE International Test Conference 1998, Washington, DC, USA, October 18-22, 1998. pages 551-556, IEEE Computer Society, 1998. [doi]

Abstract

Abstract is missing.