Denny Kopp, Lars Mönch, Detlef Pabst, Marcel Stehli. Simulation-based Performance Assessment of Tool Requalification Strategies in Wafer Fabs. In 14th IEEE International Conference on Automation Science and Engineering, CASE 2018, Munich, Germany, August 20-24, 2018. pages 638-641, IEEE, 2018. [doi]
Abstract is missing.