Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. In 14th Conference on Ph.D. Research in Microelectronics and Electronics, PRIME 2018, Prague, Czech Republic, July 2-5, 2018. pages 53-56, IEEE, 2018. [doi]
@inproceedings{KorabiGAOP18,
title = {A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing},
author = {Taki Eddine Korabi and Guillaume Graton and El Mostafa El Adel and Mustapha Ouladsine and Jacques Pinaton},
year = {2018},
doi = {10.1109/PRIME.2018.8430365},
url = {https://doi.org/10.1109/PRIME.2018.8430365},
researchr = {https://researchr.org/publication/KorabiGAOP18},
cites = {0},
citedby = {0},
pages = {53-56},
booktitle = {14th Conference on Ph.D. Research in Microelectronics and Electronics, PRIME 2018, Prague, Czech Republic, July 2-5, 2018},
publisher = {IEEE},
isbn = {978-1-5386-5387-6},
}