Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process. In 15th IEEE International Conference on Automation Science and Engineering, CASE 2019, Vancouver, BC, Canada, August 22-26, 2019. pages 930-935, IEEE, 2019. [doi]
Abstract is missing.