Temperature effects on the bulk discharge current of dielectric films of MEMS capacitive switches

M. Koutsoureli, L. Michalas, George Papaioannou. Temperature effects on the bulk discharge current of dielectric films of MEMS capacitive switches. Microelectronics Reliability, 52(9-10):2240-2244, 2012. [doi]

Authors

M. Koutsoureli

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L. Michalas

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George Papaioannou

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