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Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate

Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi. Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. IJAT, 8(1):121-127, 2014. [doi]

Authors

Koji Koyama

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Hideo Aida

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Michio Uneda

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Hidetoshi Takeda

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Seong-Woo Kim

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Hiroki Takei

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Tsutomu Yamazaki

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Toshiro Doi

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