Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate

Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi. Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. IJAT, 8(1):121-127, 2014. [doi]

@article{KoyamaHUTKTYD14,
  title = {Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate},
  author = {Koji Koyama and Hideo Aida and Michio Uneda and Hidetoshi Takeda and Seong-Woo Kim and Hiroki Takei and Tsutomu Yamazaki and Toshiro Doi},
  year = {2014},
  doi = {10.20965/ijat.2014.p0121},
  url = {http://dx.doi.org/10.20965/ijat.2014.p0121},
  researchr = {https://researchr.org/publication/KoyamaHUTKTYD14},
  cites = {0},
  citedby = {0},
  journal = {IJAT},
  volume = {8},
  number = {1},
  pages = {121-127},
}