Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate

Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi. Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. IJAT, 8(1):121-127, 2014. [doi]

Abstract

Abstract is missing.